Nuclear Science and Techniques

《核技术》(英文版) ISSN 1001-8042 CN 31-1559/TL     2019 Impact factor 1.556

Nuclear Science and Techniques ›› 2006, Vol. 17 ›› Issue (2): 78 doi: 10.1016/S1001-8042(06)60016-X

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Structure and tribological properties of Ti-containing amorphous carbon coatings prepared by cathode arc-enhanced middle-frequency magnetron sputtering

YANG Bing HUANG Zhi-Hong FAN Xiang-Jun FU De-Jun*   

  1. Accelerator Laboratory, School of Physics, Wuhan University, Wuhan 430072, China
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YANG Bing HUANG Zhi-Hong FAN Xiang-Jun FU De-Jun. Structure and tribological properties of Ti-containing amorphous carbon coatings prepared by cathode arc-enhanced middle-frequency magnetron sputtering.Nuclear Science and Techniques, 2006, 17(2): 78     doi: 10.1016/S1001-8042(06)60016-X

Abstract: Ti-containing amorphous carbon (Ti-aC) coatings were deposited on cemented carbide and Si substrates by cathode-arc-enhanced closed field middle-frequency unbalanced magnetron sputtering. The coatings were studied by using atomic force microscopy, Raman scattering, nanoindentation, and pin-on-disk testing. The measurements showed that the hardness of the coatings increased from 12 GPa at a Ti content of 1 at.% to 27 GPa at 31 at.%. The coatings exhibited different friction behaviors when facing different mating materials and changed with increasing Ti content. The coating with 4 at.% Ti exhibited excellent tribological performance with a low friction coefficient of 0.07 when facing the cemented carbide.

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