Nuclear Science and Techniques

《核技术》(英文版) ISSN 1001-8042 CN 31-1559/TL     2019 Impact factor 1.556

Nuclear Science and Techniques ›› 2011, Vol. 22 ›› Issue (6): 326-329 doi: 10.13538/j.1001-8042/nst.22.326-329


Investigation of vacuum performances of TiZrV coated pipe

ZHANG Haiou~* DAI Dongdong TANG Ziyi ZHANG Jidong SHAO Bin HE Suixia   

  1. Shanghai Institute of Applied Physics,Chinese Academy of Sciences,Shanghai 201800,China
ZHANG Haiou, DAI Dongdong, TANG Ziyi, ZHANG Jidong, SHAO Bin, HE Suixia. Investigation of vacuum performances of TiZrV coated pipe.Nuclear Science and Techniques, 2011, 22(6): 326-329     doi: 10.13538/j.1001-8042/nst.22.326-329


Some metal compounds called as Non-Evaporable-Getter have been widely used to improve vacuum system performance of accelerator facility.In this paper,a TiZrV film on the surface of stainless steel vacuum pipe is made by direct current magnetron sputtering,and its vacuum performance is experimentally studied.Our results show that the TiZrV film is partly activated at 160℃,and its pressure performance is similar with one at higher temperature. The coating reduces the ultimate pressure and prominently shortens the pressure-down time in a sputter ion pump system,thus creating evenly distributed pressure profile in a coating pipe.The adsorption rate is steady,and adsorption amount increases linearly.Such TiZrV-coated pipe behaves like pump other than gas source in vacuum system.

Key words: TiZrV, Activation, Adsorption, Pressure, Direct current magnetron sputtering