Cooling enhancement of planar-balanced magnetron cathode

doi:10.1007/s41365-017-0271-2

Nuclear Science and Techniques ›› 2017, Vol. 28 ›› Issue (8): 111 doi: 10.1007/s41365-017-0271-2

• LOW ENERGY ACCELERATOR, RAY AND APPLICATIONS • Previous Articles Next Articles

Cooling enhancement of planar-balanced magnetron cathode

M’hamed Salhi¹, Seddik E Hak Abaidia², Brahim Mohamedi¹, Sofiane Laouar¹

¹ Centre de Recherche Nucle´aire de Birine, B.P. 180, 17200 Ain-Oussera, Algeria

²Unite´ de Recherche MPE, Faculte´ des Sciences de l’Inge´nieur, Universite´ M’hamed Bougarra de Boumerde`s, 35000 Boumerde`s, Algeria

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M’hamed Salhi, Seddik E Hak Abaidia, Brahim Mohamedi, Sofiane Laouar. Cooling enhancement of planar-balanced magnetron cathode.Nuclear Science and Techniques, 2017, 28(8): 111 doi: 10.1007/s41365-017-0271-2

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Abstract

Abstract:

In physical vapor deposition on a magnetron cathode, temperature of sensitive components must be kept under threshold limit, so as to ensure the cathode reliability, the process reproducibility, and the best quality of thin films. This can be achieved by an adequate design to enhance the dissipation of heat generated at the cathode. In this paper, temperature distribution and streamlines velocity of the cathode coolant inside a cathode magnetron are analyzed by using CFD solver ANSYS FLUENT in the single-phase method in combination with k–e standards turbulent model. The results show that the design is appropriate under the calculation parameters, and for high heat densities some improvements are necessary to enhance heat dissipation and keep temperature under the threshold limit.

Key words: Magnetron cathode, PVD, Temperature threshold, CFD, ANSYS FLUENT

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Cooling enhancement of planar-balanced magnetron cathode

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