Nuclear Science and Techniques

《核技术》(英文版) ISSN 1001-8042 CN 31-1559/TL     2019 Impact factor 1.556

Nuclear Science and Techniques ›› 2017, Vol. 28 ›› Issue (6): 74 doi: 10.1007/s41365-017-0227-6

• SYNCHROTRON RADIATION TECHNOLOGY AND APPLICATIONS • Previous Articles     Next Articles

Soft X-ray ptychography method at SSRF

Chun-Peng Wang1,2, Zi-Jian Xu1, Hai-Gang Liu1, Xu-Lei Tao1,2, Ren-Zhong Tai1   

  1. 1 Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201800, China
    2 University of Chinese Academy of Sciences, Beijing 100049, China
  • Supported by:

    Supported by the National Natural Science Foundation of China (NSFC) (Grant Nos. 11225527, 11575283, 11505277) and the Ministry of Science and Technology of China (2012CB825705).

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Chun-Peng Wang, Zi-Jian Xu, Hai-Gang Liu, Xu-Lei Tao, Ren-Zhong Tai. Soft X-ray ptychography method at SSRF.Nuclear Science and Techniques, 2017, 28(6): 74     doi: 10.1007/s41365-017-0227-6
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Abstract:

Ptychography is a diffraction-based X-ray microscopy technique in which an extended sample is scanned by a coherent beam with overlapped illuminated
areas and complex transmission function of the sample is obtained by applying iterative phase retrieval algorithms to the diffraction patterns recorded at each scanned position. It permits quantitatively imaging of non-crystalline specimens at a resolution limited only by the X-ray wavelength and the maximal scattering angle detected. In this paper, the development of soft X-ray ptychography method at the BL08U1A beamline of Shanghai Synchrotron Radiation Facility is presented. The experimental setup, experimental parameters selection criteria, and post-experimental data analyzing procedures are presented in detail with a prospect of high-resolution image reconstruction in real time. The performance of this newly implemented method is demonstrated through the measurements of a resolution test pattern and two real samples: Pt–Co alloy nanoparticles and a breast cancer cell. The results indicate that strong scattering specimens can be reconstructed to sub-20 nm resolution, while a sub-25 nm resolution for biological specimens can be achieved.

Key words: Ptychography, Coherent diffraction imaging, X-ray microscopy, Phase retrieval