Nuclear Science and Techniques

《核技术》(英文版) ISSN 1001-8042 CN 31-1559/TL     2018 Impact factor 0.961

Nuclear Science and Techniques ›› 2008, Vol. 19 ›› Issue (3): 147

• SYNCHROTRON TECHNOLOGY AND APPLICATIONS • Previous Articles     Next Articles

Highly (111)-textured diamond film growth with high nucleation density

YANG Shumin1,3 WAN Dongyun2 HE Zhoutong1,3 XIA Huihao1 ZHU Dezhang1 GONG Jinlong1,*   

  1. 1 Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai 201800, China
    2 Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
    3 Graduate School of the Chinese Academy of Sciences, Beijing 100049, China
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YANG Shumin WAN Dongyun HE Zhoutong XIA Huihao ZHU Dezhang GONG Jinlong . Highly (111)-textured diamond film growth with high nucleation density.Nuclear Science and Techniques, 2008, 19(3): 147

Abstract: In a traditional hot-filament chemical vapor deposition (HF-CVD) system, highly (111)-textured diamond film was deposited on Si (111) substrate treated by diamond powder ultrasonic scratching or other methods. The relationship between the (111)-textured diamond film growth and the nucleation density has been discussed. The morphologies and structures of the films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD) and Raman spectroscopy.

Key words: Diamond film, HF-CVD, Nucleation, Defect, Silicon carbide, Nanowire