Nuclear Science and Techniques

《核技术》(英文版) ISSN 1001-8042 CN 31-1559/TL     2019 Impact factor 1.556

Nuclear Science and Techniques ›› 2004, Vol. 15 ›› Issue (6): 340

• NUCLEAR, HEAVY ION AND ATOMIC PHYSICS • Previous Articles     Next Articles

Angular distribution of sputtered atoms induced by low-energy heavy ion bombardment

ZHANG Lai1, ZHANG Zhu-Lin2,*   

  1. 1 Department of Computer Science and Technology, Anhui University of Science and Technology, Huainan 232001;
    2 Department of Mathematics and Physics, Anhui University of Science and Technology, Huainan 232001
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ZHANG Lai, ZHANG Zhu-Lin. Angular distribution of sputtered atoms induced by low-energy heavy ion bombardment.Nuclear Science and Techniques, 2004, 15(6): 340

Abstract: The sputtering yield angular distributions have been calculated based on the ion energy dependence of total sputtering yields for Ni and Mo targets bombarded by low-energy Hg+ ion. The calculated curves show excellent agreement with the corresponding Wehner’s experimental results of sputtering yield angular distribution. The fact clearly demonstrated the intrinsic relation between the ion energy dependence of total sputtering yields and the sputtering yield angular distribution. This intrinsic relation had been ignored in Yamamura’s papers (1981,1982) due to some obvious mistakes.

Key words: Total sputtering yield, Sputtering yield angular distribution, Anisotropic effect