Nuclear Science and Techniques

《核技术》(英文版) ISSN 1001-8042 CN 31-1559/TL     2019 Impact factor 1.556

Nuclear Science and Techniques ›› 2003, Vol. 14 ›› Issue (2): 115

• LOW ENERGY ACCELERATOR, RAY TECHNOLOGY AND APPLICATIONS • Previous Articles     Next Articles

Fabrication of thick BOX SOI by Smart-cut technology

WU Yan-Jun, ZHANG Miao, AN Zheng-Hua, LIN Cheng-Lu   

  1. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, the Chinese Academy of Sciences, Shanghai 200050
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WU Yan-Jun, ZHANG Miao, AN Zheng-Hua, LIN Cheng-Lu. Fabrication of thick BOX SOI by Smart-cut technology.Nuclear Science and Techniques, 2003, 14(2): 115

Abstract: A SOI material with thick BOX (2.2 μm) was successfully fabricated using the Smart-cut technology. The thick BOX SOI microstructures were investigated by high resolution cross-sectional transmission electron microscopy (XTEM), while the electrical properties were studied by the spreading resistance profile (SRP). Experimental results demonstrate that both structural and electrical properties of the SOI structure are very good.

Key words: SOI, Thick BOX, Smart-cut