Nuclear Science and Techniques

《核技术》(英文版) ISSN 1001-8042 CN 31-1559/TL     2018 Impact factor 0.961

Nuclear Science and Techniques ›› 1999, Vol. 10 ›› Issue (1): 31

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Phase changes of the ZrO2-12 wt%Y2O3 film with Ar+ irradiation

WANG Dezhi, ZHANG Hailong, YANG Bin, HUANG Ningkang   

  1. Institute of Nuclear Science and Technology, Sichuan University, Chengdu 610064
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WANG Dezhi, ZHANG Hailong, YANG Bin, HUANG Ningkang. Phase changes of the ZrO2-12 wt%Y2O3 film with Ar+ irradiation.Nuclear Science and Techniques, 1999, 10(1): 31

Abstract: The zirconia containing 12wt%Y2O3 thin films deposited by r.f. magnetron sputtering at 25℃ or 400℃, and then bombarded with Ar+ beam at room temperature were characterized with XRD before and after Ar+ bombardment. It is found that a series of phases formation and transformation happened, among them the most important event is that T'phase appeared after Ar+ irradiation and the content of the T'phase increased with the increase of Ar+ ion doses from 5x1015 to 6x1016 ions cm-2.

Key words: Magnetron sputtering, ZrO2-12wt%, Y2O3 film, Ar+ irradiation, XRD