Nuclear Science and Techniques

《核技术》(英文版) ISSN 1001-8042 CN 31-1559/TL     2019 Impact factor 1.556

Nuclear Science and Techniques ›› 2019, Vol. 30 ›› Issue (2): 26 doi: 10.1007/s41365-019-0547-9


Enhanced removal of X-ray induced carbon contamination using radio-frequency Ar/H2 plasma

Yi Wang1,2 • Qi-Peng Lu1 • Yun-Guo Gao1 • Xue-Peng Gong1 • Yuan Son1   

  1. 1 State Key Laboratory of Applied Optics, Changchun Institute of Optics and Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China
    2 University of Chinese Academy of Sciences, Beijing 100039, China
  • Received:2017-04-13 Revised:2018-06-21 Accepted:2018-08-06
  • Contact: Qi-Peng Lu; Yun-Guo Gao;
  • Supported by:
    This work was supported by the National Nature Science Foundation of China (No. 61404139), the National Science and Technology Major Project (No. 2012ZX0270 2001-005), and the State Key Laboratory of Applied Optics.
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Yi Wang, Qi-Peng Lu, Yun-Guo Gao, Xue-Peng Gong, Yuan Song. Enhanced removal of X-ray induced carbon contamination using radio-frequency Ar/H2 plasma.Nuclear Science and Techniques, 2019, 30(2): 26     doi: 10.1007/s41365-019-0547-9

Abstract: Removal of X-ray-induced carbon contamination on beamline optics was studied using radio-frequency plasma with an argon/hydrogen (Ar/H2) mixture. Experiments demonstrated that the carbon removal rate with Ar/ H2 plasma was higher than that with pure hydrogen or argon. The possible mechanism for this enhanced removal was discussed. The key working parameters for Ar/H2 plasma removal were determined, including the optimal vacuum pressure, gas mixing ratio, and source power. The optimal process was performed on a carbon-coated multilayer, and the reflectivity was recovered.

Key words: Radio-frequency plasma, X-ray irradiation, Carbon contamination