Nuclear Science and Techniques

《核技术》(英文版) ISSN 1001-8042 CN 31-1559/TL     2019 Impact factor 1.556

Nuclear Science and Techniques ›› 2017, Vol. 28 ›› Issue (8): 111 doi: 10.1007/s41365-017-0271-2

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Cooling enhancement of planar-balanced magnetron cathode

Mhamed Salhi1, Seddik E Hak Abaidia2, Brahim Mohamedi1, Sofiane Laouar1
  

  1. 1 Centre de Recherche Nucle´aire de Birine, B.P. 180, 17200 Ain-Oussera, Algeria
    2 Unite´ de Recherche MPE, Faculte´ des Sciences de l’Inge´nieur, Universite´ M’hamed Bougarra de Boumerde`s, 35000 Boumerde`s, Algeria
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M’hamed Salhi, Seddik E Hak Abaidia, Brahim Mohamedi, Sofiane Laouar. Cooling enhancement of planar-balanced magnetron cathode.Nuclear Science and Techniques, 2017, 28(8): 111     doi: 10.1007/s41365-017-0271-2

Abstract:

In physical vapor deposition on a magnetron cathode, temperature of sensitive components must be kept under threshold limit, so as to ensure the cathode reliability, the process reproducibility, and the best quality of thin films. This can be achieved by an adequate design to enhance the dissipation of heat generated at the cathode. In this paper, temperature distribution and streamlines velocity of the cathode coolant inside a cathode magnetron are analyzed by using CFD solver ANSYS FLUENT in the single-phase method in combination with k–e standards turbulent model. The results show that the design is appropriate under the calculation parameters, and for high heat densities some improvements are necessary to enhance heat dissipation and keep temperature under the threshold limit.

Key words: Magnetron cathode, PVD, Temperature threshold, CFD, ANSYS FLUENT