Nuclear Science and Techniques

《核技术》(英文版) ISSN 1001-8042 CN 31-1559/TL     2019 Impact factor 1.556

Nuclear Science and Techniques ›› 2017, Vol. 28 ›› Issue (5): 59 doi: 10.1007/s41365-017-0212-0

• NUCLEAR CHEMISTRY,RADIOCHEMISTRY,RADIOPHARMACEUTICALS AND NUCLEAR MEDICINE • Previous Articles     Next Articles

Influence of N2 flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy

Bin Han1•Ze-Song Wang1•D. Neena1•Bao-Zhu Lin1•Bing Yang2•Chuan-Sheng Liu1•De-Jun Fu1   

  1. 1 Key Laboratory of Artificial Micro- and Nano-Materials of Ministry of Education and School of Physics and Technology, Wuhan University, Wuhan 430072, China
    2 School of Power and Mechanical Engineering, Wuhan University, Wuhan 430072, China
  • Supported by:

    Spported by the National Natural Science Foundation  of China (Nos. 11375135 and 11275141), International Cooperation  
    Program of the Ministry of Science and Technology of China (No.  2015DFR00720) and Fundamental Research Funds for the Central  Universities.  

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Bin Han, Ze-Song Wang, D. Neena, Bao-Zhu Lin, Bing Yang, Chuan-Sheng Liu, De-Jun Fu. Influence of N2 flow rate on structure and properties of TiBCN films prepared by multi-cathodic arc ion plating and studied with ion beam scattering spectroscopy.Nuclear Science and Techniques, 2017, 28(5): 59     doi: 10.1007/s41365-017-0212-0
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Abstract:

TiBCN films were deposited on Si(100) and cemented carbide substrates by using multi-cathodic arc ion plating in C2H2 and N2 atmosphere. Their structure and
mechanical properties were studied systematically under different N2 flow rates. The results showed that the TiBCN films were adhered well to the substrates. Rutherford backscattering spectroscopy was employed to determine the relative concentration of Ti, B, C and N in the films. The chemical bonding states of the films were explored by X-ray photoelectron spectroscopy, revealing the presence of bonds of TiN, Ti(C,N), BN, pure B, sp2 C–C and sp3 C–C, which changed with the N2 flow rate. TiBCN films contain nanocrystals of TiN/TiCN and TiB2/Ti(B,C) embedded in an amorphous matrix consisting of amorphous BN and carbon at N2 flow rate of up to 250 sccm.

Key words: TiBCN, Nanocomposite, N2 flow rate, Rutherford backscattering spectroscopy (RBS), X-ray photoelectron spectroscopy