Positioning and characterization of micro-damage on silicon crystal surface based on optical interference method
JIN Limin, SONG Li, ZHU Wanqian, LUO Hongxin, XU Zhongmin, ZHANG Zengyan
Nuclear Techniques . 2018, (7): 70101 -070101 .  DOI: 10.11889/j.0253-3219.2018.hjs.41.070101