Nuclear Techniques

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Simulation and analysis of a high-stability flexure bending mechanism for hard X-ray submicron focusing

PAN Yaolin1,2, MAO Chengwen1, SHU Deming3, LI Aiguo1   

  1. 1. Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Jiading Campus, Shanghai 201800, China;
    2. University of Chinese Academy of Sciences, Beijing 100049, China;
    3. Advanced Photon Source, Argonne National Laboratory, Argonne, IL 60439, USA
  • Received:2017-03-03 Revised:2017-04-11 Online:2017-09-10 Published:2017-09-06
  • Supported by:

    Supported by National Natural Science Foundation of China (No.U1332120)

Abstract:

Background: The spatial resolution and focusing efficiency are the key parameters for X-ray micro-and nano-probe. Aspherical bent mirror is of great advantages such as high spatial resolution, high focusing efficiency, easy machining and achromatic. Purpose: This study aims to design a sub-micron focused bending mechanism. Methods: A high-precision flexure bending mechanism is designed for hard X-ray micro-focusing beamline (BL15U1) at Shanghai synchrotron radiation facility (SSRF) on the basis of exact bending theory. The simulation of finite element analysis (FEA) and width optimization are completed. Finally proposed bending mechanism was tested by long trace profiler (LTP). Results: The testing results show that the achieved slope error is 430 nrad. Conclusion: This high-stability flexure bending mechanism can produce a theoretical spatial resolution at 230 nm.

Key words: X-ray micro-and nano-probe, Aspheric bent-mirror, Flexure hinge, Finite element analysis

CLC Number: 

  • TL99