Nuclear Techniques ›› 2016, Vol. 39 ›› Issue (1): 10101-010101.doi: 10.11889/j.0253-3219.2016.hjs.39.010101


A new synchrotron radiation microprobe automatic scanning method based on real-time digital image processing techniques

LIANG Dongxu, LAN Xuying, YAN Shuai, ZHANG Jichao, LI Aiguo   

  1. Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Jiading Campus, Shanghai 201800, China
  • Received:2015-09-10 Revised:2015-11-05 Online:2016-01-10 Published:2016-01-14
  • Supported by:

    Supported by the National Natural Science Foundation of China (No.11205237, No.U1332120)


Background: Automation is a trend of the hard X-ray microprobe technology especially for the synchrotron radiation application where the beamline time is highly demanded. Purpose: In order to realize the synchronous radiation microprobe fluorescence automation scanning at Shanghai Synchrotron Radiation Facility (SSRF) hard X-ray microfocus beamline (BL15U1), a real-time digital image processing based method is studied and developed in this paper. Methods: The proposed system consists of a high sensitivity & high frame rate Charge Coupled Device (CCD) imaging system and a XPS motion control system. Sample alignment is integrated into the microprobe scanning functions which allow users to directly click the interested position in the image to moves the sample into the X-ray beam path. It intelligently aligns the specified point on sample surface to the X-ray beam spot. While doing the microprobe scanning, users can specify any interested region on sample surface and set the experimental scanning parameters (time range, scanning steps, and so on), then the system automatically generates a XPS motion controller configuration file for microprobe scanning, and drives the motors to implement scanning. Results: Experimental testing showed that the fluorescence mapping of standard gold mask was obtained by automation scanning and could quickly match the region of interest (ROI) on the CCD image. Conclusion: The new automatic system can improve the microprobe scanning significantly, and the software interface is much more user-friendly.

Key words: Synchrotron radiation, Digital CCD imaging, Microprobe fluorescence analysis, Automation scanning

CLC Number: 

  • TL99